Mā te tirotiro i te taratara o te mata, te teitei o ngā taahiraa me te matotoru o te kiriata angiangi i runga i ngā anga haurua-ira, ngā karāhe whatu tika me ngā wāhanga pania ka whakatau tika i te hua o te whakaputanga. Ka ngawari te karawarawa o te matawai tirotiro whakapā tuku iho i ngā tauira ngawari, engari kāore e taea e ngā taputapu ine whatu noa te whakarato i te tika taumata-nano. Me pēhea te whakatutuki i te whakamātautau kore-whakangaro, te tika nano tino-tiketike me te tirotiro whakaputa papatipu tere-whakaputa i te wā kotahi?
Kei roto i te inenga rama mā ahumahi hou a te OE ngā momo inenga inenga e rua. Mā te kimi kore-pā, ka kapi katoa i te tukanga mahi mai i te R&D taiwhanga ki te QC whakaputa ipurangi.
Ngā Aratau Interferometry Matua Rua mō ngā Papa Whenua Katoa
He rerekē tēnei pūnaha i ngā taputapu ine aratau-kotahi, ka whakauruhia e ia ngā rauropi VSI (Vertical Scanning Interferometry) me PSI (Phase-Shifting Interferometry), e ea ai ngā tono ine matua e rua me te mīhini kotahi.
| Tūemi Whakataurite | VSI / CSI | PSI |
|---|---|---|
| Ngā Papa Matua e Pā Ana | Ngā mata taratara, ngā kaupae, ngā whenua motumotu me ngā whenua uaua | He mata tino maeneene, tonu, he mata whakaata |
| Awhe Ine Teitei Poutū | Whānui te whānuitanga; ka taea te ine i ngā awaawa hohonu me ngā kaupae teitei | He whāiti te whānuitanga; kāore e tika mō ngā kaupae nunui takitahi |
| Taumira Poutū | Taumata nanometer; taumata iti-nanometer ka taea te whakatutuki me ngā rauropi kua arotauhia | Te taumira teitei rawa; te āheinga ki te tukurua ki raro ki te taumata iti-nanomita tae atu ki te taumata iti-angstrom |
| Te Manawanui ki te Pakaru o te Mata | Teitei | Iti |
| Te koretake o te wāhanga | Kāore rawa; e wātea ana te putanga uara teitei tuturu | Kei raro i te hapa takai wāhanga 2π |
| Te Ine i te Tere | Me matawai ā-tuaka, he puhoi noa iho | Tere ake te nuinga |
| Ātete Wiri | Ka pāngia e te wiri i te wā e matawai ana | Te nekehanga wāhanga maha-anga, he tairongo ake ki te wiri |
| Ngā tono noa | Te taratara, te teitei o ngā kaupae, ngā hanganga moroiti, ngā mata mīhini | Te whakamātautau i te taratara o te mata tino maeneene, te āhua o te mata me te papatahi |
PSI (Phase-Shifting Interferometry): He tohunga ki ngā āhuatanga teitei iti-tauine nano me ngā kiriata tino-angiangi, e whakarato ana i te taumira moroiti tino pai.
Whakaata Papatahi
Whakaata Piko (Whakaata Pūpū)
Tauira Tauira Whakaahua-whakaahua
Te Ine Matawai Poutū VSI: Kua arotauhia mō ngā wahi mahi he nui ngā rerekētanga teitei me ngā kaupae teitei; kei te wātea te whānuitanga ine katoa me te kore he matawai wāhanga.
Ngā pūhui porowhita iti porowhita i runga i ngā anga kua tākaihia matatau
Ngā pūwero iti porowhita i runga i ngā anga kua tākaihia matatau
rarangi karāhe iti
Mā te whakamahi i tētahi pūtake mārama ma poto-honohono 450–700 nm, ka taea e ia te pehi i te mārama kotiti mai i ngā whakaata maha, ā, ka tukuna he mahi ārai-whakararu kaha. He maha-paparanga ngā paninga o tēnei wāhanga whatu he iti te whakaata, ka taea e ia te whakaputa i ngā tohu whakararu pumau me te motuhake, ka puta he hua ine pono me te pono.
2. Ngā Whakatakotoranga Nano-Pae-Ahumahi, Ngā Raraunga Wā-Roa ka Taea te Whai me te Pūmau
-Ka whakamahia e te pūnaha he pūtake mārama ma LED me te roangaru pokapū i te 550 nm, he rite ki ngā tawhā mahi matua taumata-teitei e rite ana ki ngā paerewa utu nui o te ao.
-Taumira poutū: <1 nm, hapa ine auau: <10 nm, tino tika o te nanometer
-Awhe ine poutū mōrahi: 500 μm, kāore e hiahiatia he nekehanga anō mō ngā hanganga moroiti teitei-iti.
-Tere matawai: 100 μm/s, ka oti te matawai kotahi i roto i te 10 hēkona, ka whakataurite i te tika me te putanga tirotiro.
-E tutuki ana i ngā paerewa whai a te NIST, ko te raupaparorohiko whakatikatika-aunoa kua hangaia kia rite tonu ngā raraunga puranga whai, kia tutuki ai ngā paerewa QC tino pakari mō ngā ahumahi semiconductor me te whatu.
| Taonga | Tawhā |
| Te Ine i te Kaha | Te āhua o te mata 3D, te taratara o te mata, te teitei o ngā taahiraa me te matotoru o te kiriata o ngā rauemi whakaata me ngā wāhanga whatu |
| Aratau Kohi Raraunga | Te Inenga Matawai Poutū (VSI) + Te Inenga Whakawhiti-Wāhanga (PSI) |
| Pūnaha Whakataurite | Paerewa whai-ā-NIST + raupapatanga whakatikatika aunoa |
| Awhe Ine Poutū | 500 μm |
| Te Mara Tirohanga | 20× whāinga: 0.87 × 0.65 mm |
| Mahi Kāmera | Taumira Mōrahi: 2048×2448; Tere Anga: 74 Fps; Hōhonutanga Moka: 12 moka |
| Tere Matawai | 100 μm/s (Aratau Tika) |
| Ngā Kōwhiringa Arotahi Whāinga | Ngā whāinga whakanui 20x / 50x ka taea te whirihora |
| Hoahoa Tāutanga | He tūāpapa wehewehe wiri kaha kua hangaia, kei te wātea te whakapiringa whakapae me te poutū |
| Ahu Whānui (R×W×H) | 120 × 80 × 65 henemita |
| Taumaha Kupenga | ≤58 kg |
3. Hoahoa Kāpata Whakauru Ahumahi, Hototahi ki te Taiwhanga me te Raina Whakaputa
Kua arotauhia mō ngā awheawhe hanga papatipu me ngā taiwhanga rangahau pūtaiao me te hototahi tāutanga ngāwari.
Pūhara wehewehe wiri hohe kua hangaia: Ine pumau i raro i te wiri wheketere, kāore he ripanga wehewehe wiri tāpiri e hiahiatia ana.
Hanganga whakairi takirua: Tatūnga whakapae, poutū rānei, he ngāwari te whakauru ki ngā raina whakaputa aunoa me ngā teihana mahi taiwhanga.
Tinana kiato katoa-i-te-kotahi: He iti te rahi, 120×80×65 cm te rahi, ≤58 kg te taumaha, he māmā noa te whakatū ki te papaanga.
Ka whakauruhia e te pūnaha katoa te pūtake mārama, te wae matua o te interferometer me te waeine whakahaere. Ka taea te mono-ā-ringa i muri i te wetewete, kāore he whakaritenga ara whatu uaua e hiahiatia ana.
Whānuitanga o te Taupānga mō te Hanganga Tino Tika
Ahumahi Ārahi-ārahi: Te tirohanga whenua 3D me te teitei o ngā taahiraa o ngā anga silicon me ngā maramara moroiti-nano.
Whatu Tika: Te whakamātautau i te taratara me te matotoru o te kiriata mō ngā karāhe whatu, ngā whāinga me ngā huānga whatu pania.
Ngā Paninga Mahi Hou: Te tātaritanga o te kōtaha mata me te matotoru o ngā paninga whakaata me ngā kiriata angiangi mahi.
Ngā Taiwhanga Rangahau Pūtaiao: Te tautuhi i te hanganga moroiti-nano me te whakamātautau i te āhua o ngā wāhanga.
He maha ngā tau o te wheako ngaio ki te R&D whatu, ā, ka whakawhanakehia motuhake e Wavelength OE ngā ara whatu matua katoa me ngā rauropi ine mō ngā inenga mārama mā. Te whakahaere hangarau katoa mai i ngā pūtake mārama, ngā karāhe arotahi ki ngā pūnaha whakatikatika. Ka whakatikatikahia ia waeine kia maha ngā porowhita i mua i te tukunga. Ka whakaratohia e mātou he tautoko hangarau whai muri i te hoko katoa, ā, ka whakarite i ngā otinga ine motuhake i runga i te rahi o ngā mea mahi a te kiritaki me ngā whakaritenga raina whakaputa aunoa.
Te wā tuku: Hurae-15-2026